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dc.contributor.authorМиргород, Оксана Володимирівна-
dc.contributor.authorChub, I.-
dc.contributor.authorПирогов, Олександр Вікторович-
dc.contributor.authorРудаков Сергей Валерьевич-
dc.date.accessioned2020-10-05T09:08:01Z-
dc.date.available2020-10-05T09:08:01Z-
dc.date.issued2020-
dc.identifier.citationSelected peer-reviewed full text papers from International Scientific Applied Conference "Problems of Emergency Situations" (PES 2020)ru_RU
dc.identifier.issn1662-9752-
dc.identifier.urihttp://repositsc.nuczu.edu.ua/handle/123456789/11367-
dc.descriptionThe environmental worsening, as well as the tasks of improving the safety of production and housing and communal services, necessitates the widespread use of resistive gas sensors of the adsorption-semiconductor type. These sensors are capable of detecting the presence of various gaseous impurities in the air. In such sensors sintered dioxide powders SnO2 are traditionally used as sensitive elements. The electrical conductivity of SnO2 depends on the number of impurity atoms adsorbed from the environment by the surface of crystallites. However, the production of such sensors is material- and energy- intensive. In addition, gas-sensitive properties are manifested at temperatures above 200 °C, which limits the scope of their application and increases the cost and energy consumption.ru_RU
dc.description.abstractIn an article, studies of tin dioxide films for challenging sensitive elements of gas sensors for monitoring gaseous impurities in air have been described. The technological influence issues parameters of the process producing of tin dioxide films by magnetron sputtering at a fixed magnetron power on their crystal structure and phase composition were considered. The substrate temperature, layer thickness, and oxygen concentration in the atomized gas were considered as parameters. The foundation for improving the constructive and technological solutions of film gas sensors based on the research results was laid.ru_RU
dc.language.isoenru_RU
dc.publisherProblems of Emergency Situations: Materials and Technologiesru_RU
dc.relation.ispartofseriesMaterials Science Forum;Vol. 1006, pp 239-244-
dc.subjecttin dioxide films, gas sensor, magnetron sputteringru_RU
dc.titleInvestigation of the Gas Sensitive Properties of Tin Dioxide Films Obtained by Magnetron Sputteringru_RU
dc.typeArticleru_RU
Розташовується у зібраннях:Кафедра пожежної профілактики в населених пунктах

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