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Title: Investigation of the Gas Sensitive Properties of Tin Dioxide Films Obtained by Magnetron Sputtering
Authors: Рудаков, Сергей Валерьевич
Миргород, Оксана Володимирівна
Пирогов, Олександр Вікторович
Чуб, Игорь Андреевич
Keywords: tin dioxide films, gas sensor, magnetron sputtering
Issue Date: 2020
Publisher: Problems of Emergency Situations: Materials and Technologies
Citation: Materials Science Forum
Series/Report no.: Vol. 1006;pp 239-244
Abstract: In an article, studies of tin dioxide films for challenging sensitive elements of gas sensors for monitoring gaseous impurities in air have been described. The technological influence issues parameters of the process producing of tin dioxide films by magnetron sputtering at a fixed magnetron power on their crystal structure and phase composition were considered. The substrate temperature, layer thickness, and oxygen concentration in the atomized gas were considered as parameters. The foundation for improving the constructive and technological solutions of film gas sensors based on the research results was laid.
Description: he environmental worsening, as well as the tasks of improving the safety of production and housing and communal services, necessitates the widespread use of resistive gas sensors of the adsorption-semiconductor type. These sensors are capable of detecting the presence of various gaseous impurities in the air. In such sensors sintered dioxide powders SnO2 are traditionally used as sensitive elements. The electrical conductivity of SnO2 depends on the number of impurity atoms adsorbed from the environment by the surface of crystallites. However, the production of such sensors is material- and energy- intensive. In addition, gas-sensitive properties are manifested at temperatures above 200 °C, which limits the scope of their application and increases the cost and energy consumption.
ISSN: 1662-9752
Appears in Collections:Кафедра пожежної профілактики в населених пунктах

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