Please use this identifier to cite or link to this item: http://repositsc.nuczu.edu.ua/handle/123456789/18526
Title: Optimization of the Technology of Creating Sensitive Gas Sensors Based on Zinc Oxide
Authors: Антошкин, Алексей Анатольевич
Keywords: direct current magnetron sputtering method
gas sensor
gas sensor sensitivity
zinc oxide
Issue Date: 2023
Citation: Minska N., Ponomarenko R., Shevchenko R., Antoshkin O. Optimization of the Technology of Creating Sensitive Gas Sensors Based on Zinc Oxide //Materials Science Forum, 1096, pp. 81–86
URI: http://repositsc.nuczu.edu.ua/handle/123456789/18526
Appears in Collections:Кафедра автоматичних систем безпеки і інформаційних технологій

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