Розробка технологічних рішень газових датчиків на основі оксиду цинку для використання на об’єктах критичної інфраструктури

Abstract

This paper reports a study of a gas sensor based on nanostructured zinc oxide in order to establish the conditions for its production and operating characteristics under the influence of the target gas ethanol. The studied samples were produced by magnetron sputtering on direct current. The method of forming the device structure was chosen among others due to the fact that it has a high rate of deposition at low values of the working gas pressure, there is no overheating of the substrate, a low degree of contamination of the obtained films, the possibility of obtaining samples of uniform thickness on a large area of the substrate. A VUP-5M vacuum unit with an original material-saving magnetron was used to obtain the films. Studies of the effect of temperature on the resistance of a gas sensor based on ZnO have been carried out. It was established that the change in the resistance of the tested sample depends on the temperature of the substrate. The resistance of the gas sensor in atmospheric air decreases with increasing substrate temperature from room temperature (25 °C) to 200 °C. A further increase in temperature from 200 °C leads to an increase in the resistance of the structure until it stabilizes in the temperature range of 300–400 °C. It was established that the operating temperature range of the gas sensor based on ZnO is within 300–400 °C. The characteristics of the gas sensor based on ZnO were studied and the working temperature of the sensor was determined for the rapid identification of ethanol in atmospheric air at a target gas concentration of 500 ppm. It was established that for rapid operation of the instrument structure, the temperature of the substrate should be 400 °C, a decrease or increase in temperature leads to a decrease in the sensitivity of the sensor to the target gas. It was established that the gas sensor demonstrates stability and a consistent sensitivity response upon repeated exposure to the target gas.